Fiji G2 Plasma Ald System Tender Notice International C...

Tender Details

Title	Fiji G2 Plasma Ald System Tender Notice International Competitive Bidding
Country	United States of America
Language	English
Organization	ENERGY, DEPARTMENT OF
Published Date	16.05.2024
Deadline Date	21.05.2024
Overview	Fiji G2 Plasma Ald System Description Argonne National Laboratory is seeking a Fiji Gen 2 Plasma ALD System with the following critical features: Capable of deposition on 200 mm wafers. Can deposit high quality superconducting nitrides that have the following critical properties: (1) Low resistivity: (p(µOhm.cm) = 3.8K for TiN and >= 13.8K for NbN. Remote plasma source with working distance of >25cm from substrate to enable ion-rich and radical rich conditions. Hot wall reactor with ability to integrate in-situ diagnostics such as ellipsometry, QCM and or residual gas analyzer(RGA) mass spectrometer(MS). Walltemperature of the reactor must be able to be independently controlled up to 300°C. System must have a single input into the chamber for precursors in order to maintain the shortest path length into the reactor; precursor inputs must be via a 3-way ALD valve, constantly purged with inert gas and manifolded into a single input point into the reactor. The plasma source must not require water cooling for the automatching network. A Seren RF power supply and matching network is strongly preferred. For minimized gas consumption the standard, recommended idle consumption of the system must be less than 60 sccm total gas flow of Ar N2.Please provide the below no later than the offer deadline: 1. Completed and signed ANL-70 Request for Quotation (OK to include technical specifications on a separate proposal) 2. Completed and signed ANL-70B Pre-Award Information 3. Price justification as stated in ANL-70 Request for Quotation document 4. Country of Origin confirmation ENERGY, DEPARTMENT OF Contracting Office Address : ALBUQUERQUE , NM 87185 Primary Point of Contact : Kim Sosinski kim.sosinski@nnsa.doe.gov Phone Number 5057502625 Secondary Point of Contact : Sena, Jeff J. jeff.sena@nnsa.doe.gov Phone Number 5058455437 mmurtaugh@anl.gov Tender Notice International Competitive Bidding 4-B176-Q-00467-00 United States of America GT-101304229
NAICS	Power Electric Power Transmission Regulation and Administration of Communications Scenic and Sightseeing Transportation Regulation and Administration of Communications International Water
CPVS	Gases Laboratory, optical and precision equipments (excl. glasses) System, storage and content management software package Networks Networking, Internet and intranet software development services Control, safety, signalling and light equipment Tin Mass spectrometer Control, safety or signalling equipment for inland waterways Valve parts Office, school and office equipment cleaning services Control, safety or signalling equipment for parking facilities Command, control, communication systems Control, safety or signalling equipment for port installations Command, control, communication and computer systems System, storage and content management software development services Networking, Internet and intranet software package Laboratory, hygienic or pharmaceutical glassware Pressure-reducing, control, check or safety valves Repair and maintenance services for pumps, valves, taps and metal containers and machinery Control, safety or signalling equipment for roads Matches Nitrides Control, safety or signalling equipment for airports Repair and maintenance services of pumps, valves, taps and metal containers
UNSPSC	Valves Spectrometers Water Matches Single room IP phones Power Supply, Computer Water, sanitation and hygiene kits Power supply Water, sanitation and hygiene kit Tent, for office use Water, sanitation and hygiene kits
Regions	APEC Countries North America Northern America
Sectors	Environment and Pollution-Recycling Automobiles and Auto Parts Non-Renewable Energy Supply Postal and Courier Services Roads and Highways-Bridge Oil and Gas Printing and Publishing Construction Energy-Power and Electrical Computer Hardwares and Consumables Laboratory Equipment and Services Marine
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Title
Fiji G2 Plasma Ald System Tender Notice International Competitive Bidding
Country
United States of America
Language
English
Organization
ENERGY, DEPARTMENT OF
Published Date
16.05.2024
Deadline Date
21.05.2024
Overview
Fiji G2 Plasma Ald System Description Argonne National Laboratory is seeking a Fiji Gen 2 Plasma ALD System with the following critical features: Capable of deposition on 200 mm wafers. Can deposit high quality superconducting nitrides that have the following critical properties: (1) Low resistivity: (p(µOhm.cm) = 3.8K for TiN and >= 13.8K for NbN. Remote plasma source with working distance of >25cm from substrate to enable ion-rich and radical rich conditions. Hot wall reactor with ability to integrate in-situ diagnostics such as ellipsometry, QCM and or residual gas analyzer(RGA) mass spectrometer(MS). Walltemperature of the reactor must be able to be independently controlled up to 300°C. System must have a single input into the chamber for precursors in order to maintain the shortest path length into the reactor; precursor inputs must be via a 3-way ALD valve, constantly purged with inert gas and manifolded into a single input point into the reactor. The plasma source must not require water cooling for the automatching network. A Seren RF power supply and matching network is strongly preferred. For minimized gas consumption the standard, recommended idle consumption of the system must be less than 60 sccm total gas flow of Ar N2.Please provide the below no later than the offer deadline: 1. Completed and signed ANL-70 Request for Quotation (OK to include technical specifications on a separate proposal) 2. Completed and signed ANL-70B Pre-Award Information 3. Price justification as stated in ANL-70 Request for Quotation document 4. Country of Origin confirmation ENERGY, DEPARTMENT OF Contracting Office Address : ALBUQUERQUE , NM 87185 Primary Point of Contact : Kim Sosinski kim.sosinski@nnsa.doe.gov Phone Number 5057502625 Secondary Point of Contact : Sena, Jeff J. jeff.sena@nnsa.doe.gov Phone Number 5058455437 mmurtaugh@anl.gov Tender Notice International Competitive Bidding 4-B176-Q-00467-00 United States of America GT-101304229
NAICS
Power Electric Power Transmission Regulation and Administration of Communications Scenic and Sightseeing Transportation Regulation and Administration of Communications International Water
CPVS
Gases Laboratory, optical and precision equipments (excl. glasses) System, storage and content management software package Networks Networking, Internet and intranet software development services Control, safety, signalling and light equipment Tin Mass spectrometer Control, safety or signalling equipment for inland waterways Valve parts Office, school and office equipment cleaning services Control, safety or signalling equipment for parking facilities Command, control, communication systems Control, safety or signalling equipment for port installations Command, control, communication and computer systems System, storage and content management software development services Networking, Internet and intranet software package Laboratory, hygienic or pharmaceutical glassware Pressure-reducing, control, check or safety valves Repair and maintenance services for pumps, valves, taps and metal containers and machinery Control, safety or signalling equipment for roads Matches Nitrides Control, safety or signalling equipment for airports Repair and maintenance services of pumps, valves, taps and metal containers
UNSPSC
Valves Spectrometers Water Matches Single room IP phones Power Supply, Computer Water, sanitation and hygiene kits Power supply Water, sanitation and hygiene kit Tent, for office use Water, sanitation and hygiene kits
Regions
APEC Countries North America Northern America
Sectors
Environment and Pollution-Recycling Automobiles and Auto Parts Non-Renewable Energy Supply Postal and Courier Services Roads and Highways-Bridge Oil and Gas Printing and Publishing Construction Energy-Power and Electrical Computer Hardwares and Consumables Laboratory Equipment and Services Marine
URL
Download Document
Share