Nano-differential mobility analyzer and water-based condensation particle counter upgrades Description BACKGROUND Semiconductor manufacturing yield enhancement requires ongoing risk analysis of cleaning chemical purity wherein critical contaminants are already at levels difficult or impossible to detect, let alone identify and quantify. Next generation chips will require even purer materials and advanced metrological capabilities for the detection, identification, and quantification of impurities in semiconductor cleaning chemicals necessitating a practical roadmap for assessing material purity commensurate with the needs of the next generation in semiconductor manufacturing. The International Roadmap for Devices and Systems (IRDS) has identified that a “Lack of proven particle metrology limits the ability to confirm whether UF (ultrafiltration of Ultra-Pure Water [UPW]) is effective in controlling killer size particles down to the critical particle size. Aerosol-based testing of UF will require nebulizing and drying a UPW stream to form an aerosol and simultaneously measuring the upstream and downstream particle size distributions and number densities. This aerosolization process directly mimics what occurs on-wafer. These aerosol-based methods are quickly gaining acceptance and NIST research would speed these efforts. Specifically, we require a nano-differential mobility analyzer (nano-DMA) and water-based condensation particle counter (w-CPC) to upgrade an existing TSI scanning mobility particle sizer (SMPS) to a nano-SMPS. The nano-DMA and w-CPC upgrades will allow the SMPS to rapidly measure the size distribution and number density of sub-50 nm particles with a limit of detection (LOD) approaching 2 nm that, through optimization, could be ˜ 1.5 nm. The current SMPS system already contains the electrostatic classifier and non-radioactive charge neutralizer components. The nano-DMA and w-CPC will be used in a standard indoor chemistry laboratory with temperatures between 18 °C and 24 °C and relative humidities be... COMMERCE, DEPARTMENT OF | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY ACQUISITION MANAGEMENT DIVISION 100 BUREAU DR., GAITHERSBURG , MD 20899, USA Primary Point of Contact: Rudolph Spencer, rudolph.spencer@nist.gov jenna.bortner@nist.gov Tender Notice International Competitive Bidding NIST-SS25-CHIPS-0002 United States of America GT-108510047